描述
For more than 10 years, Hoau has been a leading supplier of rare metals such as tantalum, niobium and its alloys. Relying on China’s abundant non-ferrous metal mine resources, it brings exquisite metal processing technology to meet customers’ requirements for non-ferrous metal materials in the fields of chemical industry, optoelectronics, aviation and other fields.
Tantalum sputtering target grades, specialties and applications | |
Products | Features and applications |
Ta3N5 | It has high purity and is used as a sputter deposition coating for optical fibers in the electronics industry |
Titanium 4N | It has high purity and is used as a sputter deposition coating for semiconductor chips |
Ta4N5 (E4N5) | It has high purity and is used as a sputter deposition coating for integrated circuits in the electronics industry |
Tantalum pressing target specifications and tolerances | ||||||
Products | Thickness/mm | Tolerance/mm | Diameter/mm | Tolerance/mm | Flatness/mm·mm-1 | Roughness (Ra) / μm |
Ta3N5 | 6.35 | + 0.254 / – 0 | 152.4 | + 0.254 / -0.0 | 0.254 | 0.8 |
6.35 | + 0.254 / – 0.254 | 304.8 | + 0.254 / – 0.254 | 0.381 | 0.8 | |
11.47 | + 0.51 / – 0.0 | 298.45 | + 0.51 / – 0.0 | 0.381 | 0.8 | |
12.7 | + 1.27 / – 0.0 | 654.05 | + 1.27 / – 0.0 | 0.508 | 0.8 | |
Titanium 4N | 7.62 | + 0.762 / – 0.0 | 322.58 | + 1.02 / – 0.0 | 0.381 | 0.8 |
10.16 | + 0.076 / – 0.076 | 781.05 | + 0.076 / – 0.076 | 0.762 | 0.8 | |
Ta4N5 (E4N5) | 7.88 | + 0.762 / – 0.0 | 494.03 | + 1.02 / – 0.0 | 0.381 | 0.8 |
We can produce according to the tolerances required by customers Products 。 |
Tantalum target applications
Tantalum targets are mainly used in optical fibers, semiconductor wafers, and integrated circuits with sputter deposition coatings. It can also be used for cathodic sputtering coating, high vacuum suction active materials, etc. Tantalum targets are important materials for the use of thin film technology. The target can be used in superalloys, as blades and blades for jet turbine discs. We produce R05200, R05400, R05255, R05252, R05240 targets according to ASTM B05200, and can also make targets according to customers’ drawings.
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